Silicon pressure sensor for biomedicine applications
- 1 August 1992
- conference paper
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1783, 322-328
- https://doi.org/10.1117/12.131033
Abstract
The cather-type silicon pressure sensor for biomedical application is presented. A new cutted piezoresistors configuration of the high sensitivity pressure sensor is proposed.© (1992) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.Keywords
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