Polysilicon microgripper
- 1 June 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 33 (3) , 221-227
- https://doi.org/10.1016/0924-4247(92)80169-4
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989
- Integrated fabrication of polysilicon mechanismsIEEE Transactions on Electron Devices, 1988