Plasma Enhanced Chemical Vapor Deposition of Blanket TiSi2 on Oxide Patterned Wafers: I . Growth of Silicide
- 1 April 1992
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 139 (4) , 1159-1165
- https://doi.org/10.1149/1.2069357
Abstract
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