A Study on the Microstructure of Preferred Orientation of Lead Zirconate Titanate (PZT) Thin Films
- 1 April 1997
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 12 (4) , 1043-1047
- https://doi.org/10.1557/jmr.1997.0145
Abstract
The lead zirconate titanate (PZT) thin films were fabricated using sol-gel spin coating onto Pt/Ti/glass substrates. Effects of the holding time for pyrolysis and the coating cycle on the preferred orientation of the PZT thin films were studied. The films were fabricated with different coating cycles (3, 5, 7, 9, 11), dried at 330 °C for different holding times (5, 30, 60 min), and then annealed at the same temperature of 650 °C using rapid thermal annealing (RTA). The preferred orientations of the films were investigated using x-ray diffraction and glancing angle x-ray diffraction. The microstructure and the selected area diffraction pattern of the PZT thin films were also investigated using scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively.Keywords
This publication has 9 references indexed in Scilit:
- Electrical characteristics of (100), (111), and randomly aligned lead zirconate titanate thin filmsJournal of Applied Physics, 1994
- Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substratesJournal of Materials Research, 1994
- Effects of Substrate and Bottom Electrodes on the Phase Formation of Lead Zirconate Titanate Thin Films Prepared by the Sol-Gel MethodJapanese Journal of Applied Physics, 1994
- Effects of heating schedule and atmosphere on the phase formation of plzt thin films prepared using sol-gel processIntegrated Ferroelectrics, 1994
- Low temperature perovskite formation of lead zirconate titanate thin films by a seeding processJournal of Materials Research, 1993
- Microstructural development and electrical properties of sol-gel prepared lead zirconate-titanate thin filmsJournal of Materials Research, 1991
- Dip-coating conditions and modifications of lead titanate and lead zirconate titanate filmsJournal of Materials Science, 1990
- Preparation of epitaxial Pb(ZrxTi1−x)O3 thin films and their crystallographic, pyroelectric, and ferroelectric propertiesJournal of Applied Physics, 1989
- Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro-optic propertiesJournal of Applied Physics, 1988