A differential resonator design using a bossed structure for applications in mechanical sensors
- 31 March 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 26 (1-3) , 385-393
- https://doi.org/10.1016/0924-4247(91)87020-4
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- The application of fine-grained, tensile polysilicon to mechanicaly resonant transducersSensors and Actuators A: Physical, 1990
- A balanced resonant pressure sensorSensors and Actuators A: Physical, 1990
- Miniature pressure sensors and their temperature compensationSensors and Actuators, 1987
- Development of variable capacitance pressure transducers for vacuum applicationsJournal of Vacuum Science & Technology A, 1985
- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985
- Precise measurement of small forcesSensors and Actuators, 1983