Grazing incidence optics for soft x-ray microscopy
- 1 January 1992
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (1) , 569-573
- https://doi.org/10.1063/1.1142707
Abstract
We have developed and brought into operation a new type of scanning soft x‐ray microscope basing on a grazing incidence mirror. A ring shaped ellipsoidal mirror serves as a nonimaging but concentrating optical element to produce a microfocus. The specimen is mechanically scanned, and the image is recorded a pixel at a time. Transmission, total photoelectron yield, photoelectron spectroscopy, fluorescence, and stimulated desorption of ions and neutrals can provide information in the range of photon energies between 20 and 1300 eV. While the smallest spatially resolved structure, limited by the mirror imperfections, has a size of 0.4 μm, the minimum diameter of selected areas necessary for photoelectron microspectroscopy presently is about 4 μm.Keywords
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