A miniature Fabry-Perot interferometer fabricated using silicon micromachining techniques
- 6 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Wavelength-selective filters for single-mode fiber WDM systems using Fabry-Perot interferometersApplied Optics, 1987
- The application of capacitance micrometry to the control of Fabry-Perot etalonsJournal of Physics E: Scientific Instruments, 1984
- Confocal Fabry–Perot sensorElectronics Letters, 1982