Fabrication of three-dimensional mode converters for silicon-based integrated optics
- 1 November 2003
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 21 (6) , 2897-2902
- https://doi.org/10.1116/1.1625967
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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