Modeling and simulation of glow discharge plasma reactors

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Abstract
Large scale numerical simulations of the spatiotemporal plasma flow in low-pressure (0.1–1 Torr) radio-frequency capacitively coupled reactors were performed using a global plasma reactor model. Two-dimensional argon glow discharge simulations coupled with neutral (metastable) transport and reaction provided insight on the discharge structure and radial plasma uniformity. A one-dimensional simulation of a strongly electronegative (Cl2) discharge was also performed using the global model. Global model results suggested a ‘‘boundary layer’’ approach in which the reactor is separated into two regions: bulk plasma and sheath. The two-region model was applied successfully to the Cl2 discharge.

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