Lithium implantation profiles in metals and semiconductors
- 1 May 1989
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects and Defects in Solids
- Vol. 108 (1) , 27-44
- https://doi.org/10.1080/10420158908217867
Abstract
Lithium was implanted into various metals in the dose range of 1014-16ions/cm2 and at 50 to 300 keV. Depth distributions of lithium are recorded with a special nuclear reaction technique of extreme sensitivity, and the profile moments are deduced. The agreement between theoretical predictions and experimental findings is in general good for the first moment (projected range). However, in this particular case of Li implantation, quite unusual deviations occur for the higher moments of the distributions; often they are found much broader than predicted. This is ascribed to secondary effects, as radiation or thermal induced diffusion, and/or channeling. Examples are given.Keywords
This publication has 16 references indexed in Scilit:
- Range profiles of helium in solidsRadiation Effects, 1987
- Universal relations between range and damage profile parametersRadiation Effects, 1987
- Analytical approximations for range and damage profile parameter predictions on a microcomputerNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Background reduction in light element depth profiling by a coincidence techniqueNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Implantation profiles of Li in metalsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Effective stopping-power charges of swift ions in condensed matterPhysical Review B, 1982
- Ranges of 3He and 6Li in various solidsNuclear Instruments and Methods in Physics Research, 1982
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Applications of (n, p) and (n, α) reactions and a backscattering technique to fusion reactor materials, archeometry, and nuclear spectroscopyNuclear Instruments and Methods, 1980
- The use of neutron induced reactions for light element profiling and lattice localizationNuclear Instruments and Methods, 1978