A Study of HCl-H[sub 2] and GeCl[sub 4]-H[sub 2] Etching of Germanium Substrates for Epitaxial Deposition
Open Access
- 1 January 1964
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 111 (9) , 1099-1101
- https://doi.org/10.1149/1.2426326
Abstract
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