Practical optimization of multielectrode lenses
- 1 November 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 7 (6) , 1886-1890
- https://doi.org/10.1116/1.584686
Abstract
In a previous publication the second order electrode method (SOEM) was demonstrated to give practical designs for three electrode electrostatic lenses. Here the extension of the method is presented to include optimization of multielectrode lenses. The method uses a cubic spline approximation to calculate the axial potential distribution from the electrode shape. The optimization is carried out with respect to a practical‐application dependent merit function. The main constraints of the optimization algorithm are the first‐order optical properties of the lens, such as fixed object and image position. The smoothness of the electrode surface is a requirement incorporated in the algorithm as a constraint. Scaling the dimensions of the lens is used to focus it. A computer program has been developed, which can optimize up to nine electrode lens systems.Keywords
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