Ge layer transfer to Si for photovoltaic applications
- 1 February 2002
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 403-404, 558-562
- https://doi.org/10.1016/s0040-6090(01)01570-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Analysis of Bonding‐Related Gas Enclosure in Micromachined Cavities Sealed by Silicon Wafer BondingJournal of the Electrochemical Society, 1997
- Physics and chemistry of silicon wafer bonding investigated by infrared absorption spectroscopyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Hydrophobic silicon wafer bondingApplied Physics Letters, 1994