Summary Abstract: Characterization of ultrathin polyimide films (d∼11 Å) formed by vapor deposition of 4,4-oxidianiline and 1,2,4,5-benzenetetracarboxylic anhydride
- 1 July 1987
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 5 (4) , 1685-1686
- https://doi.org/10.1116/1.574548