Low-cost electron-beam lithography package for the scanning electron microscope
- 15 January 1988
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 27 (2) , 196
- https://doi.org/10.1364/ao.27.000196
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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