Design and testing of a fast tool servo for diamond turning
- 1 July 1985
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 7 (3) , 123-128
- https://doi.org/10.1016/0141-6359(85)90030-3
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Piezodriven 50-μm range stage with subnanometer resolutionReview of Scientific Instruments, 1978