Influence of Trichloroethylene on the Suppression of Oxidation-Induced Stacking Faults in Silicon Wafers
Open Access
- 5 February 1978
- journal article
- Published by The Electrochemical Society of Japan in Denki Kagaku oyobi Kogyo Butsuri Kagaku
- Vol. 46 (2) , 122-127
- https://doi.org/10.5796/kogyobutsurikagaku.46.122
Abstract
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