Direct coupling system between nanometer world and human world

4 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 203-208
https://doi.org/10.1109/memsys.1990.110277

Abstract

A nanomanipulator system, called the nanorobot system, which allows humans to experience the nanometer world with their own sensitivities is proposed. The nanorobot system consists of left and right hand robots with highly sensitive force sensors in the chamber of stereo scanning electron microscope (SEM) which gives three-dimensional magnified image of the process site. A prototype of the nanorobot system is described. The effectiveness of the prototype system is demonstrated by the production of a microswitch in an aluminum substrate.

Keywords

HUMANS
MANUFACTURING PROCESSES
SEMICONDUCTOR DEVICE MANUFACTURE
PROTOTYPES
ASSEMBLY
MECHANICAL ENGINEERING
PRODUCTION SYSTEMS
ROBOT SENSING SYSTEMS
FORCE SENSORS
MACHINING

This publication has 1 reference indexed in Scilit:

Binocular scanning electron microscope for simultaneous stereography.
Mineralogical Journal, 1986