Molecular dynamics simulations of deep penetration by channeled ions during low-energy ion bombardment of III–V semiconductors
- 1 March 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 10 (2) , 651-658
- https://doi.org/10.1116/1.586427
Abstract
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