Magnetron Sputter Epitaxy of Gallium Nitride on (0001) Sapphire

• 1 February 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 264-268, 1229-1234
• https://doi.org/10.4028/www.scientific.net/msf.264-268.1229

Abstract

Keywords

• EPITAXY
• GALLIUM NITRIDE (GAN)
• MAGNETRON
• PHOTOLUMINESCENCE (PL)
• RAMAN
• SPUTTER-EPITAXY
• TEM
• X-RAY