Detection of Trace Concentrations of Column III and V Hydrides by Laser-Induced Breakdown Spectroscopy

1 July 1991

journal article
research article
Published by SAGE Publications in Applied Spectroscopy

Vol. 45 (6) , 949-952
https://doi.org/10.1366/0003702914336273

Abstract

The measurement of trace concentrations (1-400 ppm) of polyatomic molecular impurities in helium was investigated by laser-induced breakdown spectroscopy (LIBS). For the Column III and V hydrides such as B₂H₆, PH₆, and AsH₃, the detectability limits with the present apparatus were determined to be 1, 3, and ∼1 ppm, respectively. It is expected that resorting to synchronous detection techniques will improve the sensitivity of LIBS for this application by as much as an order of magnitude.

Keywords

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