A study of target heating in low-energy ion-beam processing

• 1 September 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (5) , 2385-2388
• https://doi.org/10.1116/1.574082

Abstract

Keywords

• THERMOCOUPLES
• ION BEAM
• TEMPERATURE MEASUREMENT
• SURFACE TEMPERATURE
• CURRENT DENSITY