Fiber-chip-coupling based on in InP V-groove technology
- 27 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Bulk silicon holding structures for mounting of optical fibers in v-groovesJournal of Microelectromechanical Systems, 1997
- Tapered InP/InGaAsP waveguide structure for efficient fibre-chip couplingElectronics Letters, 1991
- Vertical Etching of Silicon at very High Aspect RatiosAnnual Review of Materials Science, 1979