Determination of epitaxial-layer impurity profiles by means of microwave-diode measurements

• 1 May 1963
• journal article
• research article
• Published by Elsevier in Solid-State Electronics
• Vol. 6  (3) , 309-311
• https://doi.org/10.1016/0038-1101(63)90088-1

Abstract

Keywords

• EPITAXIAL LAYER
• MICROWAVE DIODE
• DIODE MEASUREMENTS
• LAYER IMPURITY PROFILES