Materials Design Considerations for Future Lithographic Technologies.

• 1 January 1995
• journal article
• Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
• Vol. 8  (4) , 709-728
• https://doi.org/10.2494/photopolymer.8.709

Abstract

Keywords

• FUTURE LITHOGRAPHIC
• LITHOGRAPHIC TECHNOLOGIES
• MATERIALS DESIGN CONSIDERATIONS