Dielectric Properties of Plasma-Polymerized Tetrafluoroethylene Films
- 1 June 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (6R)
- https://doi.org/10.1143/jjap.27.1042
Abstract
A plasma-polymerized tetrafluoroethylene film has dielectric loss peaks below -50degC and approximately at 40degC. The effects of the substrate temperature during polymerization and of plasma irradiation after polymerization on the appearance of the peaks were studied. The low-temperature peak seems to be due to local-mode relaxation of polar groups, while the high-temperature peak seems to be due to phase transition.Keywords
This publication has 3 references indexed in Scilit:
- Plasma-Polymerized Films as Orientating Layers for Liquid CrystalsJapanese Journal of Applied Physics, 1987
- Effect of Carrier Gas on Structure of Plasma Polymerized Tetrafluoroethylene FilmsJapanese Journal of Applied Physics, 1985
- The properties of films prepared by the rf sputtering of PTFE and plasma polymerization of some freonsVacuum, 1981