The dependence of the porosity of ion-plated films on the process parameters
- 15 June 1978
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 51 (3) , 297-303
- https://doi.org/10.1016/0040-6090(78)90291-2
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Recent work on tribology of ion‐plated thin filmsJournal of Vacuum Science and Technology, 1976
- Alternating ion plating—A method of high-rate ion vapor depositionJournal of Vacuum Science and Technology, 1975
- Effect of ion bombardment during deposition on thick metal and ceramic depositsJournal of Vacuum Science and Technology, 1974