Conducting polyanilines: Discharge layers for electron-beam lithography

• 1 November 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 7  (6) , 1519-1523
• https://doi.org/10.1116/1.584524

Abstract

Keywords

• CONDUCTING POLYANILINES
• BEAM LITHOGRAPHY
• DISCHARGE LAYERS
• ELECTRON BEAM