Preferential sputtering in gold–nickel and gold–copper alloys

• 1 March 1979
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 16  (2) , 778-780
• https://doi.org/10.1116/1.570084

Abstract

Keywords

• PREFERENTIAL SPUTTERING
• COPPER ALLOYS
• SPUTTERING IN GOLD
• NICKEL AND GOLD