Organometallic Chemical Vapor Deposition

• 5 May 1989
• book chapter
• Published by American Chemical Society (ACS)
• p. 351-368
• https://doi.org/10.1021/ba-1990-0226.ch018

Abstract

Keywords

• FILMS
• VAPOR
• OMCVD
• ANNEALING
• DEPOSITION
• SUB
• ORGANOMETALLIC CHEMICAL
• HIGH