Using integrated capacitive humidity sensors in thick-film technology

• 1 May 1987
• journal article
• Published by Elsevier in Sensors and Actuators
• Vol. 11  (4) , 329-337
• https://doi.org/10.1016/0250-6874(87)80073-2

Abstract

Keywords

• THICK FILM
• FILM TECHNOLOGY
• SENSORS
• USING INTEGRATED
• INTEGRATED CAPACITIVE HUMIDITY