Highly Conductive Layer in Epitaxial ZnO Films Grown by CVD

• 1 March 1979
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 18  (3) , 673-674
• https://doi.org/10.1143/jjap.18.673

Abstract

Keywords

• FILMS GROWN
• CVD
• HIGHLY CONDUCTIVE
• EPITAXIAL ZNO
• ZNO FILMS
• CONDUCTIVE LAYER