A proposed slotted mask for direct deposition of metal contact pattern on MIS solar cells
- 1 July 1980
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 27 (7) , 1303-1304
- https://doi.org/10.1109/t-ed.1980.20027
Abstract
It is proposed that by using anisotropic etching ofKeywords
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