Novel micromachined cantilever sensors for scanning near‐field optical microscopy

• 1 April 1997
• journal article
• Published by Wiley in Journal of Microscopy
• Vol. 186  (1) , 17-22
• https://doi.org/10.1046/j.1365-2818.1997.00173.x

Abstract

Keywords

• SCANNING NEAR‐FIELD OPTICAL MICROSCOPY
• SNOM
• SCANNING FORCE MICROSCOPY
• SFM
• CANTILEVER
• SUBWAVELENGTH RESOLUTION
• HFCVD DIAMOND MEMBRANE