Atomic step distributions on annealed periodic Si(001) gratings

• 1 May 1997
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 15  (3) , 1345-1350
• https://doi.org/10.1116/1.580587

Abstract

Keywords

• PERIODIC SI
• ANNEALED PERIODIC
• ATOMIC STEP DISTRIBUTIONS
• GRATINGS