Laser-Induced Crystal Growth Measurements By Time-Resolved Optical Reflectivity
- 30 April 1981
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 0276, 128-135
- https://doi.org/10.1117/12.931698
Abstract
A recently developed optical reflectivity technique for monitoring laser-induced solid phase epitaxial crystal growth in real time is described, and examples which illustrate its use in studies of solid-state kinetics in ion-implanted and UHV-deposited films are presented. Data which show the dependence of epitaxial growth rate on the position of the crystal/amorphous interface, growth rate as a function of temperature, and deviations from ideal epitaxial growth due to competing crystallization processes are presented and discussed. The laser technique represents a significant advance in experimental capabilities for measuring details of solid phase epitaxy kinetics; crystallization rates can be accurately measured at higher temperatures, and with greater temporal and spatial resolution than had been previously possible.Keywords
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