The use of a biomolecular target for crystalline carbon nitride film deposition by Ar ion-beam sputtering without any other source of nitrogen
- 23 June 1998
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 72 (26) , 3449-3451
- https://doi.org/10.1063/1.121662
Abstract
Carbon nitride films have been synthesized by argon ion-beam sputtering from a biomolecular compound target, 8-aza-6-aminopurine The compound has a six-membered ring structure similar to that existing in the hypothetical Except for the target material, no other source of nitrogen was used during sputtering deposition. It was found that crystalline carbon nitride with high N/C atomic composition ratios of 0.43–0.56 can be formed even at room temperature. The infrared spectra of the film exhibit two peaks at 1383 and corresponding to C–N and stretching modes, respectively. No detectable peak at stretching mode) is observed. Both x-ray diffraction and transmission electron microscopy show a very strong broad peak at 3.2 Å, comparable to the spacing of the (110) orientation in the structure. However, it is suggested that the film contains a nanocrystalline phase with a crystal structure yet to be determined.
Keywords
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