A Chemical Etchant for the Selective Removal of GaAs Through SiO[sub 2] Masks

• 1 January 1974
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 121  (9) , 1215
• https://doi.org/10.1149/1.2402016

Abstract

Keywords

• CHEMICAL ETCHANT
• SELECTIVE REMOVAL
• MASKS
• SUB
• REMOVAL OF GAAS
• GAAS THROUGH SIO