Some physical aspects of ion implantation
Open Access
- 1 January 1985
- journal article
- Published by Uspekhi Fizicheskikh Nauk (UFN) Journal in Uspekhi Fizicheskih Nauk
- Vol. 145 (2) , 329-346
- https://doi.org/10.3367/ufnr.0145.198502e.0329
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: