The determination of electron energy distributions in discharges with secondary plasma parts

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Abstract
In electron energy distribution measurements with Langmuir probes, in low pressure discharges, distortions appear if secondary discharge parts such as anode glow or a positive column exist between the plasma surrounding the probe and the reference electrode. For a current-independent instance Rp of these discharge parts it is possible to evaluate a factor (Rs+Rp/Rs)3 to correct the relation between the current amplitude of the first harmonic and the second derivative. I2 omega (U=U0 sin omega t) = -1/4U02((Rs+Rp)/Rs)3d2I/dU2 cos 2 omega t. U0 is the amplitude of the applied fundamental wave, and Rs is the resistance of the probe-plasma transition.