ESEM - A multipurpose surface Electron Microscope

Abstract
Over recent years a new type of electron microscope - the environmental scanning electron microscope (ESEM) - has been developed for the examination of specimen surfaces in the presence of gases. A detailed series of reports on the system has appeared elsewhere. A review summary of the current state and potential of the system is presented here.The gas composition, temperature and pressure can be varied in the specimen chamber of the ESEM. With air, the pressure can be up to one atmosphere (about 1000 mbar). Environments with fully saturated water vapor only at room temperature (20-30 mbar) can be easily maintained whilst liquid water or other solutions, together with uncoated specimens, can be imaged routinely during various applications.