Plasma‐Assisted Molecular Beam Epitaxy of III–V Nitrides

• 26 March 2003
• book chapter
• Published by Wiley
• p. 107-191
• https://doi.org/10.1002/3527607641.ch3

Abstract

Keywords

• PLASMA-ASSISTED MOLECULAR BEAM EPITAXY OF III–V NITRIDES
• NITROGEN PLASMA SOURCE
• FUNDAMENTALS OF THE GAN (0001) EPITAXIAL GROWTH BY PAMBE
• STRUCTURE OF THE GAN {0001} SURFACES
• GAN SUBSTRATE PREPARATION
• HETEROEPITAXIAL GROWTH
• III-NITRIDE ALLOYS AND DEVICE HETEROSTRUCTURES