Formation of Al Dot Hexagonal Array on Si Using Anodic Oxidation and Selective Etching

• 15 March 2002
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 41  (Part 2, No) , L340-L343
• https://doi.org/10.1143/jjap.41.l340

Abstract

Keywords

• OXIDATION AND SELECTIVE
• AL DOT
• HEXAGONAL ARRAY
• DOT HEXAGONAL
• SELECTIVE ETCHING
• SI USING
• USING ANODIC
• ANODIC OXIDATION