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An introduction to closed field sputtering (CFS) equipment
Home
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An introduction to closed field sputtering (CFS) equipment
An introduction to closed field sputtering (CFS) equipment
GS
Gb Sugden
Gb Sugden
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1 January 1979
journal article
Published by
Elsevier
in
Vacuum
Vol. 29
(10)
,
351-356
https://doi.org/10.1016/0042-207x(79)90313-0
Abstract
No abstract available
Cited
Cited by 1 article
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