Optical emission diagnostics ofC60-containing laser-ablated plumes for carbon film deposition

Optical-emission studies of laser-ablated carbon plasma used for deposition of carbon films is reported at irradiance in the range 2.4×${10}^8$–9.0×${10}^{10}$ W/${\mathrm{cm}}^2$ using 1.064-, 0.532-, and 0.355-μm laser wavelengths in the presence of ambient gas. The presence of argon gas has a pronounced effect on the emission. The vibrational temperature calculated from molecular ${\mathrm{C}}_2$ Swan bands is found to peak at an intermediate laser irradiance. ${\mathrm{C}}_{60}$-containing carbon films are deposited on a silicon substrate at various ambient gas pressures and the correlation between their formation and laser-produced plasma parameters is discussed.