Tribological properties of diamond-like carbon films deposited on silicon using r.f. plasma enhanced CVD
- 1 July 1995
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 73 (1-2) , 132-136
- https://doi.org/10.1016/0257-8972(94)02377-8
Abstract
No abstract availableKeywords
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