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Activation Energy for Electromigration Failure in Aluminum Films Containing Copper
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Activation Energy for Electromigration Failure in Aluminum Films Containing Copper
Activation Energy for Electromigration Failure in Aluminum Films Containing Copper
FD
F. M. D'Heurle
F. M. D'Heurle
NA
N. G. Ainslie
N. G. Ainslie
AG
A. Gangulee
A. Gangulee
MS
M. C. Shine
M. C. Shine
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1 January 1972
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 9
(1)
,
289-293
https://doi.org/10.1116/1.1316583
Abstract
No abstract available
Keywords
ELECTROMIGRATION
ACTIVATION ENERGY
COPPER
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Cited by 62 articles
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