States of residual stress both in films and in their substrates

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 2801-2808
• https://doi.org/10.1116/1.573682

Abstract

Keywords

• STATES OF RESIDUAL
• RESIDUAL STRESS BOTH IN FILMS
• FILMS AND IN THEIR SUBSTRATES