Low Temperature Preparation of As-Sputtered Superconducting YBaCuO Thin Films by Magnetron Sputtering
- 1 July 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (7A) , L1260-1261
- https://doi.org/10.1143/jjap.27.l1260
Abstract
Superconducting YBa2Cu3O7-δ thin films were prepared on SrTiO3(100) planes at 560°C by rf multitarget magnetron sputtering without postannealing. The films were composed of two differently oriented grains with the c or a axis perpendicular to the surface. The preferential orientation could be controlled by the preparation condition. The transition to a superconducting state started at 90 K and zero resistance was achieved at 80 K for the films.Keywords
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