A Comparison of RTO and Furnace Oxides
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The relation between positive charge and breakdown in metal-oxide-silicon structuresJournal of Applied Physics, 1987
- Structural Characterization of Processed Silicon WafersIEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1983
- Dielectric breakdown in electrically stressed thin films of thermal SiO2Journal of Applied Physics, 1978